GB/T 14141-2009

Active

Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array

硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A