GB/T 13389-2014

Active

Practice for conversion between resistivity and dopant density for boron-doped, phosphorus-doped, and arsenic-doped silicon

掺硼掺磷掺砷硅单晶电阻率与掺杂剂浓度换算规程

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2014-12-31
Implementation
2015-09-01
Responsible Dept
国家标准委
Drafting Unit
N/A