GB/T 13388-2009

Active

Method for measuring crystallographic orientation of flats on single-crystal silicon slices and wafers by X-ray techniques

硅片参考面结晶学取向X射线测试方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A