GB/T 13387-2009

Active

Test method for measuring flat length wafers of silicon and other electronic materials

硅及其他电子材料晶片参考面长度测量方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A