Home / Standards / GB/T 13387-2009 GB/T 13387-2009 Active Test method for measuring flat length wafers of silicon and other electronic materials 硅及其他电子材料晶片参考面长度测量方法 Standard Type GBT ICS 29.045 CCS H80 Status 现行 Issue Date 2009-10-30 Implementation 2010-06-01 Responsible Dept 国家标准委 Drafting Unit N/A