GB/T 13062-2018
ActiveSemiconductor devices—Integrated circuits—Part 21-1:Blank detail specification for film integrated circuits and hybrid film integrated circuits on the basis of the qualification approval procedures
半导体器件 集成电路 第21-1部分:膜集成电路和混合膜集成电路空白详细规范(采用鉴定批准程序)