Home / Standards / GB/T 12964-2003 GB/T 12964-2003 Abolished Monocrystalline silicon polished wafers 硅单晶抛光片 Standard Type GBT ICS 29.045 CCS H82 Status 废止 Issue Date 2003-06-16 Implementation 2004-01-01 Responsible Dept 国家标准委 Drafting Unit N/A