GB/T 11073-2025

Active

Test method for measuring radial resistivity variation on silicon wafers

硅片径向电阻率变化测量方法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2025-10-31
Implementation
2026-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A