GB/T 11073-2007

Abolished

Standard method for measuring radial resistivity variation on silicon slices

硅片径向电阻率变化的测量方法

Standard Type
GBT
ICS
77.040.01
CCS
H17
Status
废止
Issue Date
2007-09-11
Implementation
2008-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A