GB/T 10067.417-2023

Active

Basic specifications for electroheating and electromagnetic processing installations—Part 417:Silicon carbide crystal growth installations

电热和电磁处理装置基本技术条件 第417部分：碳化硅单晶生长装置

Standard Type
GBT
ICS
25.180.10
CCS
K61
Status
现行
Issue Date
2023-05-23
Implementation
2023-12-01
Responsible Dept
中国电器工业协会
Drafting Unit
N/A